VIEW Precis 200 VIEW 200_供应

VIEW Precis 200 VIEW 200

2024-09-05 16:20 点击:573

联系方式

公司：东莞市天测光学设备有限公司

状态：发送留言

姓名：张人雷(先生)

传真：0769-89026366

地区：广东-东莞市

地址：中国广东，重庆，昆山，上海，深圳，香港

邮件：rex@tiance-optical.com

Q Q ：442179358

价格:未填

发送询价

美国VIEW Precis 200影像测量仪

美国VIEW Precis 200影像测量仪是一款应用于晶圆、掩膜版、MEMs和HDD正面的高测量系统。该款Precis结合了工作台、可靠的显微光学系统和可选的三款的测量软件套装，具备为过程测量提供新水平的能力。
美国VIEW Precis 200影像测量仪在视野内实现了亚微米级测量，点间距测量精度可达0.65μm
双闭环伺服马达控制保证、平稳的移动
符合人体工程学的紧凑设计
独有的微焦点技术保证、可重复聚焦的的运动

测量软件:
IEW Metrology Software (VMS)
选配： Elements 测量软件
选配： Measure-X 测量软件

选配软件模块:
• 区域多聚焦
• SmartProfile® 3D GD&T 评测软件
• 的图像滤波，图像拼接，用户自定义界面
• VMS 离线工作站软件
• 数字 IO

美国VIEW Precis 200影像测量仪特征

	标配	选配
X,Y,Z行程(mm)	200 x 200 x 5	200 x 200 x 100
XY载物台	Hand crafted, precision lapped compound stage
Z轴	Micro Focus Block™ microflexure focus assembly	扩展Z轴运动，空气轴承运动和线性马达驱动
X,Y,Z刻度分辨率	0.01μm
载物台驱动	X,Y轴连杆驱动直流伺服；Z轴旋转直流伺服
zui大推荐负载	12 kg
成像光学	Olympus显微镜光学系统, 包含卧式明暗场照明器，五孔电动物镜转盘，带目镜倾斜三目观察筒和标准摄像机接口
前透镜（可现场更换）	10明场物镜 50长工作距离明场物镜	5X明场物镜或明暗场物镜 10明场物镜或明暗场物镜 20长工作距离明场物镜或明暗场物镜 50长工作距离明场物镜或明暗场物镜 100长工作距离明场物镜或明暗场物镜
测量相机	140万像素 (1392 x 1040), 1/2-inch, 数码, 黑白摄像机	200万像素(1628 x 1236), 数码,黑白摄像机
照明装置	全光谱、可调节卤钨同轴表面光	带N.A.调节绿色LED透射光
传感器选项		Integrated photo spectrometer for photoresist and thin film thickness measurements
操作系统	四核处理器， Windows ® 7 操作系统，集成网络和通信端口
控制器配件包	3轴操作杆控制手动载物台, 带急停按钮和开始按钮	单LCD 平板显示器, 键盘和鼠标双LCD 平板显示器, 键盘和鼠标
电源供应	115/230 VAC, 50/60 Hz, 1-Phase, 700W
额定环境	温度: 20°C ± 0.2°C 相对湿度: 30% - 80% 振动: ISO VC-B	振动: 使用150物镜时ISO VC-C
X,Y线性精度1,2,3,4	E1: (0.25+2L/1000) μm
Z轴线性精度1,2,5	E1: (0.25) μm (使用100物镜)
说明：所有参数均是在20°C恒温环境下得到	1.zui大温度变化率: 1° C/小时；2. zui大垂直温度梯度: 1° C/m 3. 在匀速状态下均匀分布载荷5KG 4. XY区域accuracy artifact:在标准测量平面QVI网格分划板或者QVI线条刻度。定义25mm工作台表面为标准测量平面。 5. Z轴 accuracy artifact: QVI step gage, interferometer or master gage blocks

Precis的应用范围包括：
半导体/电子
PCB板与Stencil
光罩
引线框，引线接合，柔性线路板，连接器
SMT元件贴装
锡膏/环氧数脂胶点
芯片载体和托盒
喷墨打印机墨盒

数据存储
磁盘介质基板
滑块和悬臂组(HGA)
Wafer carriers and row bar pallets

注塑和机加工件
模具和刀具
医疗设备
燃料喷射部件
手表组件

VIEW Precis® 200
The VIEW Precis 200 from QVI® is a high accuracy micro-metrology system for wafers, masks, MEMs, and HDD heads. The Precis combines precision stages, proven microscope optics, and a choice of three world-class metrology software packages to provide new levels of capability for process metrology.

The VIEW Precis delivers sub-micron field-of-view and point-to-point measurement accuracy on features as small as 0.65 μm.

Dual Loop Servo Motion Control for precise and stable part translation

Ergonomic control station and compact footprint

Exclusive Mirco Focus Block provides rigid, repeatable focus motion

Metrology Software:
VIEW Metrology Software (VMS)
• Optional: Elements® metrology software
• Optional: Measure-X® metrology software

Available Optional Software Modules:
Area Multi-Focus
• MeasureFit® Plus
• SmartProfile® 3D GD&T evaluation software
• Advanced image filtering, image stitching custom UI
• VMS Off-Line Workstation Software
• Digital IO

Featuring:

	Standard	Optional
X,Y,Z Travel (mm)	200 x 200 x 5	200 x 200 x 100
XY Stage	Hand crafted, precision lapped compound stage
Z Stage	Micro Focus Block™ microflexure focus assembly	Extended Z-axis motion with precision air bearing motion and linear motor drive
X,Y,Z Scale Resolution	0.01 μm
Stage Drive System	Rod drive DC servo X,Y motion, and rotary DC servo Z-axis motion
Max Recommended Load	12 kg
Imaging Optics	Microscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret, and camera back tube
Front Lens (Field Interchangeable)	10 Bright Field 50 Long Working Distance, Bright Field	5X Bright Field or Bright Field/Dark Field 10 Bright Field or Bright Field/Dark Field 20 Long Working Distance, Bright Field or Bright Field/Dark Field 50 Long Working Distance, Bright Field or Bright Field/Dark Field 100 Long Working Distance, Bright Field or Bright Field/Dark Field
Metrology Camera	1.4 megapixel (1392 x 1040), 1/2-inch, digital, monochrome	2.0 megapixel (1628 x 1236), digital monochrome
Illumination	Full spectrum tungsten halogen coaxial surface light	Green LED transmitted light with auto N.A. stop
Sensor Options		Integrated photo spectrometer for photoresist and thin film thickness measurements
System Controller	® Quad core processor, Windows 7 Operating System and on-board networking and communication ports
Controller Accessory Package	3-axis joystick for manual stage control, with E-stop and start buttons.	Single LCD flat panel display, computer keyboard and mouse Dual LCD flat panel displays, computer keyboard and mouse
Power Requirements	115/230 VAC, 50/60 Hz, 1-Phase, 700W
Rated Environment	Temperature: 20°C ± 0.2°C Relative Humidity: 30% - 80% Vibration: ISO VC-B	Vibration: ISO VC-C for use of 150 objective lens
1,2,3,4 X,Y Linear Accuracy	E1: (0.25+2L/1000) μm
1,2 Z Linear Accuracy	E1: (0.25) μm (with use of a 100 lens)
Notes:All specifications apply to a thermally stable machine and a certified artifact.	1. Maximum rate of temperature change: 0.5° C/Hour \| 2. Maximum vertical temperature gradient: 1° C/Meter 3. At rated velocity with evenly distributed load of 5KG ® 4. X,Y linear accuracy artifact: QVI grid reticle (low expansion material) or QVI linescale in the standard measuring plane. Standard measuring plane is defined as within 25 mm of the worktable surface

applications for Precis include:
Semiconductor/Electronics
PCBs and Stencils
Photo masks
Lead frames, wire bonds, flex circuits, connectors
SMT component placement
Solder paste/Epoxy glue dot
Chip carriers and trays
Inkjet printer cartridges

Data Storage
Suspensions
Slider and Head Gimble Assemblies (HGA)
Disk Media substrates

Precision plastic molded and machined parts
Dies and tooling
Medical devices
Fuel injection components
Watch components

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